Spectroscopic Ellipsometer

Organisaatiot: Aalto-yliopiston teknillinen korkeakoulu (TKK) » Elektroniikan, tietoliikenteen ja automaation tiedekunta » TKK Micronova

Sentech SE 805

Markus Bosund

2006

Spectroscopic ellipsometer for the wavelength range 700-1700 nm

Used for measuring thickness and optical properties (reactive index and extinction coefficent) of thin films.

Wavelength range 700-1700 nm. Adjustable angle of incidence. Fitting software.

Micronova Nanofabrication Centre - room 1152. Tietotie 3, 02150 Espoo

Espoo

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