Mapping Controlled Atmosphere Kelvin-Probe System

Organisaatiot: Aalto-yliopiston teknillinen korkeakoulu (TKK) » Elektroniikan, tietoliikenteen ja automaation tiedekunta » TKK Micronova

Semilab High Temperature Kelvin Scanner

Sergey Novikov

2004

2004

Kelvin Probe measures contactless the work function of the material. Based on change of capacitance, plates of capacitance are sample's surface and Kelvin Probe.

Developing new materials for the gas sensing applcation, collecting chemical image

Two parts on Kelvin scanner's gas system: one generates gas mixture from compounds, which are liquid at room temperature and another generates compounds, which are gas at room temperature

Chemical image from the sample             up to 100*100 mm area

Controllable gas atmosphere's
temperature range                                         20-450°C

Micronova Nanofabrication Centre - thin film lab R15. Tietotie 3, 02150 Espoo

Espoo

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