Semilab Inc. DLS-83D Deep Level Spectrometer
Hele Savin
2007
2008
Technique for monitoring and characterizing deep levels
Characterizing, monitoring
Fully automatic measurement mode complete interpretation of measured data, impurity indentification, concentration determination, Transistent Ion Drift (TID) mode
Bias voltage and excitation pulse -20 V...20 V
Excitation pulse frequency 0.1 - 2500 Hz
Excitation pulse width 50 ns - 65 ms
Temperature range 77 K - 450 K (liquid nitrogen cryostat),
20 K - 330 K (closed cycle He-cryostat)