Deep Level Spectrometer

Organisaatiot: Aalto-yliopiston teknillinen korkeakoulu (TKK) » Elektroniikan, tietoliikenteen ja automaation tiedekunta » TKK Micronova

Semilab Inc. DLS-83D Deep Level Spectrometer

Hele Savin

2007

2008

Technique for monitoring and characterizing deep levels

Characterizing, monitoring

Fully automatic measurement mode complete interpretation of measured data, impurity indentification, concentration determination, Transistent Ion Drift (TID) mode

Bias voltage and excitation pulse      -20 V...20 V

Excitation pulse frequency                    0.1 - 2500 Hz

Excitation pulse width                            50 ns - 65 ms

Temperature range                                77 K - 450 K (liquid nitrogen cryostat),

                                                                   20 K - 330 K (closed cycle He-cryostat)

Micronova Nanofabrication Centre - lab 4159. Tietotie 3, 02150 Espoo

Espoo

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