Profilometer

Organisaatiot: Aalto-yliopiston teknillinen korkeakoulu (TKK) » Elektroniikan, tietoliikenteen ja automaation tiedekunta » TKK Micronova

SLOAN Dektak 3

Kestutis Grigoras

Surface texture measuring system

Measuring surface texture thickness, measuring and

approximating thickness of manufactured metal film, approximating depth of etching

Accurate surface texture measuring up to

65 micrometers

Standard stylus tip radius                       12.5 micrometers

                      Optional tips                        5 and 25 micrometers

 

Three speeds (low, medium, high)

Low provides high horizontal resolution with 2000 data points per scan

Higher speeds reduce scanning time 


Micronova Nanofabrication Centre – cleanroom section F10. Tietotie 3, 02150 Espoo

Espoo

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