SLOAN Dektak 3
Kestutis Grigoras
Surface texture measuring system
Measuring surface texture thickness, measuring and
approximating thickness of manufactured metal film, approximating depth of etching
Accurate surface texture measuring up to
65 micrometers
Standard stylus tip radius 12.5 micrometers
Optional tips 5 and 25 micrometers
Three speeds (low, medium, high)
Low provides high horizontal resolution with 2000 data points per scan
Higher speeds reduce scanning time