Electrochemical etching system for silicon

Organisaatiot: Itä-Suomen yliopisto » Fysiikan ja matematiikan laitos (Kuopio) » Pharmaceutical Physics

Vesa-Pekka Lehto

2008

2009

Electrochemical etching system for 10 cm silicon wafers

Production of porous silicon

Computer programmable power source 
Pump for removing electrolyte

Maximum current 19 A
Silicon wafer size 10 cm

University of Eastern Finland, Department of Physics and Mathematics, Yliopistonranta 1 F (Melania), 70211 Kuopio

Kuopio

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