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Photolithography

  • 1. Nanofabrication
  • 1.1. Nanolithography and Direct Patterning
  • 1.1.1. Photolithography
    • Instruments
    Manual High Precision Mask Aligner - University of Oulu
    Mask aligner - Tampere University of Technology
    Photolithography mask patterning device - University of Oulu
    Spin coater - Savonia University of Applied Sciences
    Spin Coater - University of Oulu
    Spin Coater - University of Oulu
    UV exposure system + Mask aligner - Savonia University of Applied Sciences
    UV Mask Aligner - University of Jyväskylä
    UV-Mask aligner with NIL support - Tampere University of Technology
    Wet Bench - University of Oulu

    Expertise
    Nanoprecision positioning systems with laser interferometric feedback - ACWACO Ltd.
  • 1.1.2. Electron Beam Lithography (EBL)
  • 1.1.3. Nanoimprint Lithography (NIL)
  • 1.1.4. Laser Interference Lithography (LIL)
  • 1.1.5. Near Field Holography (NFH)
  • 1.1.6. Micro Contact Printing
  • 1.1.7. Focused Ion Beam Milling
  • 1.1.8. Ion/Electron Beam Assisted Vapor Deposition
  • 1.1.9. Dip Pen Nanolithography
  • 1.1.10. Other Nanolithography and Direct Patterning
  • 2. Characterization
  • 3. Computation, Modeling and Simulation
  • 4. Other
MIKTECH OY - Graanintie 5, 50190 Mikkeli FINLAND
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