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Ion Implantation

  • 1. Nanofabrication
  • 1.6. Structural Modification
  • 1.6.1. Ion Implantation
    • Instruments
    Ion Implanter - Aalto University School of Science and Technology (TKK)

  • 1.6.2. Diffusion
  • 1.6.3. Thermal Annealing
  • 1.6.4. Particle Beam Irradiation
  • 1.6.5. Other Structural Modification
  • 2. Characterization
  • 3. Computation, Modeling and Simulation
  • 4. Other
MIKTECH OY - Graanintie 5, 50190 Mikkeli FINLAND
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