KLA Tencor P-15
Antti Nuottajärvi
Mikko Laitinen mikko.laitinen@jyu.fi
2002
2002
Highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces
MicroHead that has a vertical range of 327 um and
is capable of scanning at forces between 1 mg and 50 mg. The maximum allowed substrate thickness is about 20 mm and the maximum weight is few hundred grams. The radius of the diamond stylus tip is 2 um with 60° cone angle.
The top-down view 100-500x magnification
The motorized stage enables automatic leveling and programmable rotation of the sample and can accommodate substrates up to 8 inches.
The substrate can be held by vacuum.
The maximum horizontal scan length is 80 mm.
The user can measure 2D or 3D profiles.
Software run on Windows NT
The absolut vertical resolution is 25 nm and for horizontal direction about 1 um for standard stylus (radius).
Scan repeatability is ~7.5 Å or 0.1% of step height, whichever is greater, and the reproducibility is ~15 Å or 0.25% of step height, whichever is greater.
The profiler is placed on an passive vibration isolation table that suppresses the low-frequency building noise