Vacuum Evaporator

Name and Model: Balzers Baltec BAE 250

Contact Person: Antti Nuottajärvi
nuanka@jyu.fi +358503956002

Year of Manufacture: 1993

Year of Installation: 1993

General Technical Information: Balzers BalTec BAE 250 e-beam evaporator

Desrcription of Use:

Thin film deposition of metals and insulators.

Key Features and Accessories: e-beam evaporation of various metals (Au, Ag, Al, Bi, Cu, Cr, Ge, Mn, Ni, Pt, Ti,..) and insulators (SiO, SiO₂, AlOx). Tunnel junction processing by oxidation between evaporations.

Key Specifications:

TT-3 electron gun

Acceleration voltage: 4-7 kV

Max. current: 750 mA

Five pockets linear

Turbo pumped vacuum chamber (10^-6 mbar)

Chamber walls heated/cooled with water circulation

Sample holder can be tilted and rotated

Deposition thickness monitored by Inficon Thickness Monitor

Photograph:

Location: University of Jyväskylä, Nanoscience Center, Cleanroom
Survontie 9, 40500 Jyväskylä

City: Jyväskylä