Stylus Profilometer

Organization: Mikpolis Oy

Stylus Profilometer - Dektak 6M

Simo Torniainen
Mobile +358 40 759 3369simo.torniainen@mamk.fi

2006

2006

Dektak 6M profilometer measures the surface topography electromechanically by moving a sample beneath a diamond-tipped stylus. As the sample stage moves, the stylus scans over the surface of the sample. The vertical movements of the stylus is measured and recorded simultaneously during the scanning, which reveals the topographical structure of the surface.

The instrument has vertical resolution in nanometers and horizontal resolution as small as twenty nanometers. Programmable stylus force and scan speed allow measurements on variety of substrate materials.


Applications:

Dektak 6M can be used to profile surface topography and waviness, as well as measuring surface roughness in the nanometer range.

Features:

* Computer controlled measurement
* Nanometers vertical resolution
* Mechanical and optical components for sample placement, viewing and scanning
* Styluses with different sizes permit measurement in a wide range of applications
* A color, high-resolution video camera for color video of a 2.6x2.6 mm area
* Convenient X-Y positioning

Vertical range262 µm
Vertical resolution (at various range)1 Å / 65 KÅ, 10 Å / 655 KÅ, 40Å/2620KÅ
Scan length range50 µm to 30 mm
Scan speed ranges3 seconds to 200 seconds
Software levellingTwo-point programmable or cursor leveling
Stage levellingManual
Step detectionCursor can be automatically positioned before and after stepts for automatic computation of analytical functions
StyliDiamond: 2,5 µm / 12,5 µm (other diameters on request)
Stylus tracking forceProgrammable 1…15 mg
Max. sample thickness31,75 mm
Sample stage diameter150 mm
Manual stage positiontranslationX-axis 20 mmY-axis 80 mm
Sample stage rotationManual theta 360º
Max. sample weight680 g

Mikkeli University of Applied Sciences
Materials Technology

Mikkeli

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