Optical 3D profilometer

Organization: Mikpolis Oy

Optical 3D profilometer FRT-Microprof

Aapo Nylén
Mobile: + 358 40 534 5127email: aapo.nylen@mamk.fi

2006

2006

The MicroProf works as an optical profilometer (2D) as well as an imaging measuring instrument (3D) by means of a scanning process. Roughness and waviness can be determined in 2D or 3D according to DIN EN ISO standards. With the optical sensor FRT CWL, the sample is illuminated by focused white light. Evaluating the reflected light, the sensor investigates the structures on the sample at a working distance of 4 mm.

 

Measuring rangeAccuracy zlocalMeasuring resolution
z-directionxy-direction
300 µm± 100 nm~10 nm~2  µm
600 µm± 200 nm~20 nm~2  µm
3 mm± 1 µm~100 nm~6  µm
Coating thickness: measuring range 2-200 µm± 100 nm~10 nm~30  µm

Mikkeli University of Applied Sciences / Material technology

Mikkeli

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