Fizeau interferometer

Organization: MIKES Centre for Metrology

Zygo GPi

Björn Hemming
bjorn.hemming@mikes.fi 010-6054403

Flatness measurements by fizeau interferometer (optical flat, substrate).

Sample diameter < 150 mm

Measurement range: 12 µm

Uncertainty 45 nm

Uncertainty 45 nm

Mittatekniikan keskus (MIKES)
Tekniikantie 1
02151 Espoo

Espoo

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