Name and Model: Zygo GPi
Contact Person: Björn Hemming bjorn.hemming@mikes.fi 010-6054403
Year of Manufacture:
Year of Installation:
General Technical Information:
Desrcription of Use: Flatness measurements by fizeau interferometer (optical flat, substrate).
Key Features and Accessories:
Sample diameter < 150 mm
Measurement range: 12 µm
Uncertainty 45 nm
Key Specifications: Uncertainty 45 nm
Photograph:
Location: Mittatekniikan keskus (MIKES) Tekniikantie 1 02151 Espoo
City: Espoo
Additional information:
Booking:
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