Form Talysurf series 2
Björn Hemming
bjorn.hemming@mikes.fi 010-6054403
2D and 3D form measurements
Surface roughness measurements (R3y, R3z, Ra, Rc, Rda, Rdc, Rdq, RHSC, Rku, Rln, RLo, Rlq, Rmr, Rmr(c), Rp, RPc, Rq, RS, Rsk, RSm, Rt , Rv, RVo, Rz, Rz(JIS))
Surface roughness measurements are based on standards ISO 5436-1 and ISO 4287
Measurement tips: radius 2 µm (diamond tip)
radius 0.397 mm (sapphire tip)
Measurement force: 1 mN (diamond tip) or 15-20 mN (sapphire tip)
Measurement range: 120 mm x 50 mm x 28 mm (x,y,z)
Resolution: 0.6 nm (in z direction)
Uncertainty down to 10 nm (depends on the sample dimensions)
Uncertainty in surface roughness measurements 10 %