Metrology Atomic Force Microscope (MAFM)

Name and Model: MIKES IT-MAFM

Contact Person: Virpi Korpelainen
virpi.korpelainen@mikes.fi010-6054412

Year of Manufacture:

Year of Installation:

General Technical Information:

Atomic Force Microscope (AFM) with sample position measurement by 3D interferometers

Desrcription of Use:

Quantitative microscopy, especially calibration of calibration standards (1D and 2D pitch, orthogonality, step height, flatness)

Key Features and Accessories:

Metrology AFM with online 3D interferometric position measurement => direct traceability to the metre

Key Specifications:

X-Y scan size: 120 µm x 120 µm

Z measurement range: 16 µm

Uncertainty level < 1 nm

Photograph:

Location: Mittatekniikan keskus (MIKES)
Tekniikantie 1
02151 Espoo

City: Espoo