PSIA XE-100
Virpi Korpelainen
virpi.korpelainen@mikes.fi010-6054412
2004
2004
Atomic Force Microscope (AFM)
Electrostatic force microscopy (EFM)
Measurements in liquid
Quantitative microscopy
Surface characterization, also in liquid
Electrostatic properties
Non-contact mode AFM
Contact mode AFM
Tapping mode AFM
Electrostatic Force Microscopy (EFM)
Lateral Force Microscopy (LFM)
Force vs distance Curve
Liquid Cell
Calibrated x, y and z scales => quantitative measurements
Separated xy and z scanners => small background curvature
Sample size: up to 100 mm x 100 mm x 20 mm
Sample mass: 500 g
X-Y scan size: 100 µm x 100 µm
X-Y resolution: <0.15 nm
Z measurement range: 12 µm
Z resolution 0.05 nm (0.01 nm in low voltage mode)