Name and Model: Laurell WS-400A-6NPP/Lite
Contact Person: Tomi Ryynänen
Year of Manufacture: 2003
Year of Installation: 2004
General Technical Information: Programmable spin coater with manual dispensing.
Desrcription of Use: Spin coating of wafers by thin layer of photoresist or polymer etc.
Key Features and Accessories: Sample fixed to sample holder by vacuum. Programmable. Manual dispensing with pipette.
Key Specifications: Rotation speed: 100-6000 rpmProgram slots: 20Steps per program: up to 51Chamber size: Ø8.5"
Photograph:
Location: Tampere University of Technology, Sähkötalo building, ASE cleanroom, Se209a.
City: Tampere
Additional information:
Booking: Via contact person.
Are you sure you want to delete this instrument?
