Veeco Dektak8
Hannu Moilanen
2001
2006
Stylus profilometer system for surface texture measurements
Thin and thick film thickness measurements. Photoresist thickness measurements. Surface roughnes analysis. 3D mapping.
Up to 200mm scans on soft materials without damage. Programmable stage positioning recalls up to 200 sites. APS statistical process control. Installed software options: 1mm vertical range, 3D mapping, Power theta, Step detection, Stress measurement.
Measurement technique:
Stylus profilometry
Vertical Range:
50 Å to 2,620 kÅ (0.1 microinch to 10 mils)
Vertical Resolution (at various ranges):
1 Å/65 kÅ, 10 Å/655 kÅ, 40 Å/2620 kÅ
Scan Length Range:
50 μm to 50 mm (2 mils to 2"), 100 mm maximum (200 mm stitched)
Scan Speed Ranges:
3 seconds to 200 seconds
Software Leveling:
Two-point programmable or cursor leveling
Stage Leveling:
Manual
Stylus:
12.5 μm, 5 μm, 2.5 μm
Stylus Tracking Force:
Programmable, 1-15mg
Maximum Sample Thickness:
25.4 mm (1")
Sample Stage Diameter:
200 mm
Sensor Position Translation:
X Axis: 200 mm (8")Y Axis: 200 mm (8")
Sample Stage Rotation:
Programmable Theta, 360º; with and without encoders
Maximum Sample Weight:
2.5 kg (5 lbs.)
Warm-up Time:
15 min. for maximum stability
Camera Field of View:
High mag. = 1 mm; Low mag. = 8 mm
Dual cameras:
top-down view and 45º side view
Sample Illumination:
Variable intensity white light LED
System control:
Windows Dektak32 software