Resistive evaporator

Organization: University of Helsinki » Department of Chemistry » Epäorgaanisen kemian laboratorio

Edwards Auto 306

Eero Santala

2004

Resistive evaporator for thermal evaporation of metals.

Evaporation of metallic thin films, mostly for electrical contacting or for substrates for subsequent processing.

Al, Ag, and Cu can be evaporated.

University of Helsinki, Department of Chemistry, A.I.Virtasen aukio 1, 00560 Helsinki

Helsinki

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