Electron beam evaporator

Name and Model: Instrumentti Mattila IM9912 with a Telemark electron beam source

Contact Person: Marko Vehkamäki

Year of Manufacture: 2000

Year of Installation: 2000

General Technical Information: Electron beam evaporator (EBE)

Desrcription of Use: Evaporation of metallic thin films, mostly for electrical contacting and for substrates for subsequent processing. Preparation of sculptured thin films of metals and oxides by glancing angle deposition (GLAD).

Key Features and Accessories: A TFI TELEMARK 241 six-pocket E-gun and a TFI TELEMARK ST4 (4 kW, 10 kV) power source. Several materials including Al, Pt, Ti, Cr, Au, Cu, Pd, Ag, Mo, Si, Al₂O₃, SiO₂ etc. can be evaporated. Cryopumped system with base pressure about 5x10^-7 mbar. Programmable QCM thickness monitor. Accessories: a rotating sample stage for preparation of GLAD structures; a heatable sample stage for evaporation at elevated temperatures.

Key Specifications:

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Location: University of Helsinki, Department of Chemistry, A.I.Virtasen aukio 1, 00560 Helsinki

City: Helsinki