Electron Beam Coater

Name and Model: Instrumentti Mattila IM9912

Contact Person: Matthias Meschke

Year of Manufacture: 2007

Year of Installation: 2007

General Technical Information: A versatile system for thin film deposition

Desrcription of Use: Thin film deposition

Key Features and Accessories:

10 kV electron gun, load lock, oxygen inlet for tunnel junction fabrication, system is cryopumped, six targets on a revolver typed platform

Additional features:

• Two angle sample tilting
• automatic sample rotation
• substrate heating with quartz lamp and temperature measurement by pyrometer
• substrate cleaning with argon plasma gun 

Key Specifications:

Evaporated materials                 Al, Ti, Au, Pd

Wafer size                                     max 4 inch, clamps for small pieces

Typical deposition range           10 nm/min

Working pressure range           10^-6 to 10^-8 mbar

Substrate temperature               20°C to 250°C

Loading time                               10 min 

Photograph:

Location: Micronova Nanofabrication Centre - maintenance area of the cleanroom, between F9 and F10. Tietotie 3, 02150 Espoo

City: Espoo