Name and Model: Bidtec SP-100
Contact Person: Katja Myllymaa katja.myllymaa@savonia.fi +358 44 785 5551
Year of Manufacture: 2005
Year of Installation: 2006
General Technical Information: Spin coater for making uniform thin films to flat substraces. Especially for resist chemicals.
Desrcription of Use: Coating of substrates with UV- and ebeam-resists.
Key Features and Accessories: Several custom made sample holders. Vacuum pump, custom made vacuum line filtering.
Key Specifications:
Programming: up to 10 programs
Maximum rpm: 7500
Chucks: 1.75", 5.75" and few custom made (by our own CNC)
Photograph:
Location: Savonia University of Applied Sciences, School of Engineering and Technology, Microkatu 1C, FI-70201 Kuopio, Finland
City: Kuopio
Additional information: Available with or without operator. Use of the system is easy to learn.
Booking: In case of "as a service", please, call contact person.
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