Name and Model: Instrumentti Mattila / SV Vacuumservice
Contact Person: Ari Halvari ari.halvari@savonia.fi +358 44 785 5579
Year of Manufacture: 2005
Year of Installation: 2005
General Technical Information: UHV-class e-Beam evaporation system
Desrcription of Use: Evaporation of metals.
Key Features and Accessories: CTI Cryogenics Cryo-Torr 8 cryopump (1500 l/s air, 1x10-9 Torr). Alcatel Adixen 2005 SD prepump (5 m3/h). Telemark 241-04 gun. Telmark TT3 power. Thickness monitor. Chamber heating/cooling. Custom made rotary sample stage.
Key Specifications: Power: 3 kW, 450 mA@7 kVMain pump: CTI Cryogenics Cryo Torr 8 cryopump (1x10-9 Torr)Thickness monitoring: 0.01 nm (quart crystal microbalance-type)Crucibles: custom made in Savonia by using CNC, in a revolver, 6x4 cc
Photograph:
Location: Savonia University of Applied Sciences, School of Engineering and Technology, Microkatu 1C, FI-70201 Kuopio, Finland
City: Kuopio
Additional information: Available only as a service for short term use. With long term needs call the contact person for more information.
Booking: In case of "as a service", please, call contact person.
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