Name and Model: SLOAN Dektak 3
Contact Person: Kestutis Grigoras
Year of Manufacture:
Year of Installation:
General Technical Information: Surface texture measuring system
Desrcription of Use:
Measuring surface texture thickness, measuring and
approximating thickness of manufactured metal film, approximating depth of etching
Key Features and Accessories:
Accurate surface texture measuring up to
65 micrometers
Key Specifications:
Standard stylus tip radius 12.5 micrometers
Optional tips 5 and 25 micrometers
Three speeds (low, medium, high)
Low provides high horizontal resolution with 2000 data points per scan
Higher speeds reduce scanning time
Photograph:
Location: Micronova Nanofabrication Centre – cleanroom section F10. Tietotie 3, 02150 Espoo
City: Espoo
Additional information: Manual is next to the equipment
Booking: Not done, equipment nearly always free
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