Philips XL30 ESEM TMP
Arto Koistinen
2000
XL30 ESEM-TMP environmental scanning electron microscope is applicable for the examination of both dry and water containing specimens with good resolution (3.5 nm). Specimens can also be analysed with EDS -analyser that makes the element analysis of the sample possible.
High vacuum mode
"Low vacuum" mode
ESEM mode
Embedded Röntec EDS analyser
Gun: Tungsten gun
Accelerating voltage: 0.2-30 kV
Resolution at 30 kV: 3.5 nm in high vacuum mode and in 5 Torr ESEM mode. 25 nm in 1 kV in high vacuum mode.
Magnification: 5x to 400,000x
Specimen movements: X=50 mm, Y=50 mm, rotation=360° continuous, tilt range -15° to +75°, 0 to +45° for large specimens, Z movement 50 mm total, max free space=60 mm.
Sample chamber: inside diameter 284 mm