Name and Model: Zeiss/Opton DSM-950 Scanning Electron Microscope
Contact Person: Antti J. Niskanen
Year of Manufacture: Model manufactured since 1985
Year of Installation: 1996
General Technical Information: Scanning electron microscope scans sample’s surface with high resolution. It uses electron beam instead of light.
Desrcription of Use: Imaging and measuring submicrometer-scales
Key Features and Accessories: Shows 3-dimensional structures, modified for use as an electron-beam lithography tool and electron-beam induced current (EBIC) analysis
Key Specifications:
Magnification up to 350 000 times
Acceleration voltage 1-30 kV
Detector SE
BSE and EDX (additionals)
Jitter silencer tennisballs
Photograph:
Location: Micronova Nanofabrication Centre – room 1152. Tietotie 3, 02150 Espoo
City: Espoo
Additional information: Antti J. Niskanen, Veli-Matti Airaksinen
Booking: http://www.micronova.fi/booking
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