Chemical Vapour Deposition

Organization: University of Eastern Finland » Department of Physics and Mathematics (Joensuu)

Kurt J. Lesker, experimental

Pertti Pääkkönen

2007

2007

Plasma enhanced chemical vapour deposition tool.

Fabrication of carbon nanostructures and microdiamonds.

Experimental setup for generating carbon nano and microstructures from methane and hydrogen plasma.

Electrode size 60 mm
Plasma generator
15 kW, 1500 V DC
Process gases
H2, CH4
  

Joensuu

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