Name and Model: AG Associates Heatpulse 610
Contact Person: Hannu Moilanen
Year of Manufacture:
Year of Installation:
General Technical Information:
Desrcription of Use: RTA (Rapid Thermal Annealing) furnace is used for rapid heat treatment of materials
Key Features and Accessories:
The furnace can heat the samples at the temperature of hundreds of degrees within a few seconds. It can be used for example post-annealing of thin films.
Key Specifications: Maximum temperature: 800 °CMaximum rate of temperature increase: 20 °C/sAtmospheres: air, N2, H2 Maximum sample size: 6”
Photograph:
Location: University of Oulu, Center of Microscopy and Nanotechnology, Cleanroom
City: Oulu
Additional information:
Booking:
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