TOF-ERDA spectrometer

Name and Model:

Contact Person: Timo Sajavaara
timo.sajavaara(at)jyu.fi

Year of Manufacture: 2009

Year of Installation: 2009

General Technical Information: A unique and powerful tool for elemental depth profiling of thin films.

Desrcription of Use: A heavy ion beam from Pelletron accelerator is guided to the sample to be studied. The velocity (TOF) and energy are measured in coincidence for forward scattered sample atoms and incident ions.

Key Features and Accessories: With TOF-ERDA spectrometer all sample atoms can be detected and used in quantitative depth profiling.

Key Specifications:

• Quantitative analysis of all elements possible (including hydrogen)
• Film thicknesses from 5 nm to 500 nm
• Depth resolution even 1-2 nm at the surface
• Sensitivity: down to 0.1 at.% or better

Photograph:

Location: Pelletron facility at the Accelerator Laboratory

City: Jyväskylä