Tube furnace

Organization: University of Eastern Finland » Department of Physics and Mathematics (Kuopio) » Pharmaceutical Physics

Nabertherm R 50/500/12

Vesa-Pekka Lehto

2009

2009

Tube furnace for surface modification of silicon. Can be used for thermal hydrocarbonization, thermal carbonization and thermal oxidation.

Surface modification of (porous) silicon
Annealing of porous silicon

Quartz tube

Tube size Inner diameter, 34 mm, length 500, 400 and 300 mm
Heated length 500 mm
Installed gasses nitrogen, acetylene
Max temperature 1200 °C

University of Eastern Finland, Department of Physics and Mathematics, Yliopistonranta 1 F (Melania), 70211 Kuopio

Kuopio

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