Surface profiler

Name and Model: Veeco Dektak 150+

Contact Person: Pertti Pääkkönen

Year of Manufacture: 2009

Year of Installation: 2009

General Technical Information: Sufrace profiler with stylus.

Desrcription of Use:

• Film thickness measurement

Key Features and Accessories:

• Available stylii: 12.5 µm, 2.5µm
• Motorized XY stage 152 mm x 152 mm
• Step standard 4.454 µm 0.058 µm

Key Specifications:

• Horizontal scan range: 55 mm
• Vertical range: 1 mm
• Repeatability: 0.4 nm @ 0.1 µm step, 1 nm @ 1 µm step

Photograph:

Location: University of Joensuu, Department of Physics and Mathematics

City: Joensuu