Optical profiler

Name and Model: Veeco WYKO NT9300

Contact Person: Pertti Pääkkönen

Year of Manufacture: 2009

Year of Installation: 2009

General Technical Information: Scanning white light interferometer.

Desrcription of Use:

• Measurement of surface profiles 
• Measurement of surface curvatures
• Measurement of surface roughness

Key Features and Accessories:

• Motorized XY table 155 mm x 155 mm
• Motorized tip-tilt optics head
• Objectives: 2.5x, 20x, and 50x
• Field multipliers: 0.55x, 1.0x and 2.0x
• Field stitching capability
• Measurement and analyzing software

Key Specifications:

• Vertical resolution: < 0.1 nm RMS
• Max slope angle: objective dependent, 1.9° (2.5x), 14.2° (20x), and 26.7° (50x)
• Vertical range: 10 mm, 24 µm/sec
• Horizontal resolution: objective dependent down to 0.5 µm
• Horizontal range: objective dependent, field stitching available

Photograph:

Location: Univeristy of Joensuu, Department of Physics and Mathematics

City: Joensuu