Hitachi S-4800 FE-SEM
Mika Suvanto
2005
2005
High-resolution field emission scanning electron microscope
High resolutin SEM and STEM imaging and X-ray microanalysis
Detectors: upper and lower secondary electron detectors, equipped with an energy filter, YAG detector, STEM detector (brigh / dark field), EDS detector
Acceleration voltage: 0,5-30 kV
Resolution: 1.0 nm at 15 kV, 2.0 nm at 1 kV
Magnification: 20-800 000x
Stage: X-Y 0-50 mm, Z 1.5-40 mm, tilt: -5 - +70°, rotation: 360°