Field emission scanning electron microscope, FE-SEM

Organization: University of Eastern Finland » Department of Chemistry (Joensuu)

Hitachi S-4800 FE-SEM

Mika Suvanto

2005

2005

High-resolution field emission scanning electron microscope

High resolutin SEM and STEM imaging and X-ray microanalysis

Detectors: upper and lower secondary electron detectors, equipped with an energy filter, YAG detector, STEM detector (brigh / dark field), EDS detector

Acceleration voltage: 0,5-30 kV

Resolution: 1.0 nm at 15 kV, 2.0 nm at 1 kV

Magnification: 20-800 000x

Stage: X-Y 0-50 mm, Z 1.5-40 mm, tilt: -5 - +70°, rotation: 360°

University of Eastern Finland, Joensuu campus, Department of Chemistry

Joensuu

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