Optical profiling system

Name and Model: Wyko NT1100

Contact Person: Kati Rissa
+358 40 849 0142, www.tut.fi/matchar

Year of Manufacture:

Year of Installation:

General Technical Information: The NT1100 provides high resolution 3D surface measurement, from sub-nanometer roughness to millimeter-high steps. Advanced optics ensure sub-nanometer vertical resolution at all magnifications. The Data Stitching option adds a motorized stage for high resolution measurements over a larger field of view.

Desrcription of Use: The NT1100 enables accurate metrology for R&D and production of MEMS, thick films, optics, ceramics, and advanced materials.

Key Features and Accessories:

• Measurement Techniques: optical phase -shifting and white light vertical scanning interferometry

• Measurement Capability: three - dimensional, non - contact, surfaceprofile measurements

• Objectives: 2.5X, 5.0X, 20X, 50X

• Field-of-View Lenses: 0.5X, 1.0X, 2.0X

• Wyko Vision® software

Key Specifications:

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Location: Tampere University of Technology

City: Tampere