Scanning electron microscope (SEM)

Name and Model: Philips XL 30

Contact Person: Kati Rissa
http://www.tut.fi/matchar

Year of Manufacture: 1996

Year of Installation: 1996

General Technical Information: This is a state-of-art scanning electron microscope (SEM) equipped for X-ray microanalysis, Anton Paar microhardness tester, and electron backscattering detector (EBSD).

Desrcription of Use: Characterization of various materials

Key Features and Accessories:

• Imaging with both secondary and backscattering electrons
• ISI's Image Analysis and processing software
• EDAX Energy Dispersive X-ray Spectrometer (EDS)
• electron backscattering pattern detector (EBSP)
• microhardness tester Anton Paar µ-Indenter 5

Key Specifications:

• equipped with a LaB6 filament
• point resolution 2 nm

Photograph:

Location: Tampere University of Technology, Department of Materials Science, Korkeakoulunkatu 6, 33720 Tampere

City: Tampere