Carl Zeiss NTS GmbH, Scanning Electron Microscope ULTRAplus
Kati Rissa
+358 40 849 0142
2007
2008
Ultra high resolution field emission SEM with EDS and EBSD
Characterization of various materials. Suitable for transmission electron microscopy studies of polymers (STEM-detector).
Detectors: inlens SE, EsB, AsB, Everhart-Thornley, and STEM
Charge compensator for non-conductive samples
SIS Scandium image analysis and processing software
INCA Energy 350 EDS analyzator with INCAx-act peltier cooled analytical drift detector (ADD)
- Resolution 133 eV/10 mm²
- Stable analytical results with count rate up to 40000 cps and fast X-ray mapping
HKL Premium-F Channel EBSD system with ultrafast Nordlys F400 detector
- Mapping, advanced texture analysis and phase ID with forescatter detector
- Indexing hit rate at 400 Hz: 99%
- Resolution 1.0 nm at 15 kV and 1.7 nm at 1 kV
- Accelerating voltage 100 V - 30 kV
- Beam current up to 40 nA
- Active antivibration system AVI-400
Tampere University of Technology, Department of Materials Science, Korkeakoulunkatu 6, 33720 Tampere
Tampere