Field emission scanning electron microscope (FEG-SEM)

Organization: Tampere University of Technology » Department of Materials Science

Carl Zeiss NTS GmbH, Scanning Electron Microscope ULTRAplus

Kati Rissa
+358 40 849 0142

2007

2008

Ultra high resolution field emission SEM with EDS and EBSD

Characterization of various materials. Suitable for transmission electron microscopy studies of polymers (STEM-detector).

Detectors: inlens SE, EsB, AsB, Everhart-Thornley, and STEM

Charge compensator for non-conductive samples

SIS Scandium image analysis and processing software

INCA Energy 350 EDS analyzator with INCAx-act peltier cooled analytical drift detector (ADD)

  • Resolution 133 eV/10 mm²
  • Stable analytical results with count rate up to 40000 cps and fast X-ray mapping

HKL Premium-F Channel EBSD system with ultrafast Nordlys F400 detector

  • Mapping, advanced texture analysis and phase ID with forescatter detector
  • Indexing hit rate at 400 Hz: 99%

  • Resolution 1.0 nm at 15 kV and 1.7 nm at 1 kV
  • Accelerating voltage 100 V - 30 kV
  • Beam current up to 40 nA
  • Active antivibration system AVI-400

Tampere University of Technology, Department of Materials Science, Korkeakoulunkatu 6, 33720 Tampere

Tampere

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