Name and Model: Sloan SL1800
Contact Person: David Cameron david.cameron@lut.fi Phone 0408352649
Year of Manufacture:
Year of Installation: 2006
General Technical Information:
Cryopump system
Rotary deposition chamber, two targets.
Desrcription of Use: Deposition of metals and compounds
Key Features and Accessories:
Pulsed DC and RF power supples
Optical feedback for stoichiometry control in reactive sputtering.
Key Specifications:
Photograph:
Location: ASTRaL Lappeeenranta University of Technology Patteristonkatu 3
City: 50100 Mikkeli
Additional information:
Booking:
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