Scanning electron microscope (SEM)

Name and Model: Carl Zeiss NTS GmbH, Scanning Electron Microscope ULTRA 55

Contact Person: Jukka Viheriälä

Year of Manufacture: 2007

Year of Installation: 2007

General Technical Information: High resolution imaging system.

Desrcription of Use: Imaging of nanopatterns.

Key Features and Accessories: Excellent picture quality on every sample. Imaging at very short working distances - 1mm WD. High-class usability, fully motorised 5-axes motorised eucentric stage. Sample positioning with stage movement. Operated by mouse, keyboard and joystick with optional control panel. Fast access to sample trough load lock. FE-SEM with GEMINI electron optical column including a Schottky-type field emitter

Key Specifications: Emitter  Schottky
Voltage  100V - 30kV  
Current  4 pA - 10 nA
Current stability  0,2% / h
Resolution:
  0,8nm 30kV
  1,0nm 15kV
  1,7nm 1 kV
  4nm 0,1kV
Image resolution Up to 3072 x 2304 pixels
Magnification  12 – 900000x
Moving of the stage X : 0  130 mm Y: 0  130 mm, Z: 0 50 mm
  R: 360°
  Tilt: -3 +70 
Chamber  330 mm (Ø) x 270 mm (h)
Max sample size 5 in.

Photograph:

Location: Tampere University of Technology, Optoelectronics research centre (ORC), Cleanroom SK215A, Korkeakoulunkatu 3, 33720 Tampere

City: Tampere