Contact Person: Leonid Mihaljov
Desrcription of Expertise:
Compensation for environmental errors in positioning systems with laser interferometric feedback.
1.1.1 Photolithography 1.1.4 Laser Interference Lithography (LIL) 1.1.10 Other Nanolithography and Direct Patterning 1.2.15 Layer-by-Layer Assembly 1.2.18 Other Thin film Deposition and Growth 1.5.7 Other Surface Modification 1.11.1 Nanoelectronic Devices 1.11.2 Nanophotonic Devices 1.11.3 Nanofluidics 1.11.4 Other Device Fabrication
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